| 105g压阻效应阵列式加速度微传感器硅悬臂梁结构分析 |
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| 引用本文： | 谢元睿,刘晓明. 105g压阻效应阵列式加速度微传感器硅悬臂梁结构分析[J]. 电子机械工程, 2004, 20(6): 54-56,61 |
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| 作者姓名： | 谢元睿 刘晓明 |
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| 作者单位： | 电子科技大学机电学院微机电系统研究室,四川,成都,610054 |
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| 摘 要： | 在已有10^5g压阻效应阵列式加速度微传感器版图设计的基础上，应用有限元理论及相关软件，对版图中的硅微悬臂梁进行了模态分析和结构动态计算。将宏观理论应用到微观结构分析中；并对该种结构的加速度传感器的样品进行了冲击实验，得到实验曲线。对计算分析与实验结果进行了比较，指出并分析了误差可能出现的方面。
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| 关 键 词： | 阵列式加速度微传感器 模态分析 结构分析 有限元 沙漏效应 |
| 文章编号： | 1008-5300(2004)06-0054-03 |
Structural Analysis of Silicon-cantilever-beam of a 105g Piezo-resistance-effect Micro Acceleration Sensor Array |
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| XIE Yuan-rui and LIU Xiao-ming. Structural Analysis of Silicon-cantilever-beam of a 105g Piezo-resistance-effect Micro Acceleration Sensor Array[J]. Electro-Mechanical Engineering, 2004, 20(6): 54-56,61 |
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| Authors: | XIE Yuan-rui and LIU Xiao-ming |
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| Affiliation: | University of Electronic Science and Technology of China and University of Electronic Science and Technology of China |
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| Abstract: | On the basis of an available design of 105g micro acceleration sensor array layout, the modal frequency and structure dynamic response of a silicon-cantilever-beam are analyzed using the finite element method and relevant software. In this paper a method of applying the macro-theories to the micro-structure has been tried. The shock experiment of the micro sensor was carried out, and the experimental result is obtained. This paper compares the results of simulation and experiment, then points out and analyzes possible reasons of error. |
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| Keywords: | micro acceleration sensor array modal analysis structural analysis finite element method hourglassing effect |
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