| 适合于纳秒激光微加工的压电陶瓷微位移平台 |
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| 引用本文： | 张蓉,傅星.适合于纳秒激光微加工的压电陶瓷微位移平台[J].机械与电子,2010(5):28-30. |
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| 作者姓名： | 张蓉 傅星 |
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| 作者单位： | 天津大学精密测试技术与仪器国家重点实验室,天津,300072 |
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| 摘 要： | 针对纳秒激光微加工的具体要求，设计了一种压电陶瓷的微位移工作台控制系统，它是由压电陶瓷、柔性铰链机构和DSP控制系统组成。基于TMS320VC33的DSP作为控制中心，主要用于对采集到的位移信号进行处理，通过PID算法控制微动平台的移动距离。将该微位移平台安装在纳秒激光微加工机上，与原系统配合进行加工，可以有效改善微结构加工的效果。
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| 关 键 词： | 纳秒激光 微加工 压电陶瓷 闭环控制 分辨力 |
Piezoelectric Ceramics Micro-displacement Stage Suitable for Nano-second Laser Micro-machining |
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| ZHANG Rong,FU Xing.Piezoelectric Ceramics Micro-displacement Stage Suitable for Nano-second Laser Micro-machining[J].Machinery & Electronics,2010(5):28-30. |
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| Authors: | ZHANG Rong FU Xing |
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| Affiliation: | (State Key Laboratory of Precision Measuring Technology and Instruments,Tianjin University,Tianjin 300072,China) |
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| Abstract: | A PZT micro - displacement stage controlling system which is consist of piezoelectric ceramics, flexible hinge bodies and digital signal processor is designed to meet the specific requirements of nano - second laser micro - machining DSP as the control center can analyze the collected signal and control the stage movement by PID control algorithm. It can improve the machining result of micro - structure when attached to nano - second laser micro 2 machining system. |
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| Keywords: | nano - second laser micro - machi-ning piezoelectric ceramics close - loop control resolution |
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