分级倾斜微圆柱结构的高灵敏度柔性触觉传感器

为了满足电容式柔性触觉传感器在可穿戴电子设备、智能机器人、人机交互等领域的精准触觉感知应用需求，基于分级倾斜微圆柱结构提出柔性触觉传感器．传感器在受到外界压强作用时，引起倾斜微圆柱分级变形，导致传感器电容增大．结合仿真和实验研究传感器结构特征对其灵敏度的影响规律，揭示不同结构参数设计的传感器信号输出与加载压强间的关系，优化触觉传感器结构．实验数据表明，所提传感器具有良好的灵敏度(0.44 kPa^?1)和低检测下限(2.6 Pa)，响应时间为40 ms，最大迟滞误差为6.7%，在2 400次循环加/卸载过程中展现了优异的重复性和稳定性．该传感器可以拓展为不同尺寸和形状的“皮肤”阵列，实现了机械手精准感知和人体运动姿态监测．

High sensitivity flexible tactile sensor with hierarchical tilted micro-pillar structure

A flexible tactile sensor was proposed based on the hierarchical titled micro-pillar structure, in order to meet the precise tactile sensing application requirements of capacitive flexible tactile sensors in wearable electronic devices, intelligent robots and other fields. When the sensor was subjected to external pressure, the titled micro-pillar was deformed in stages, resulting in an increase in the capacitance of the sensor. Combined with simulation and experiment, the influence of sensor structure characteristics on its sensitivity were studied, the relationship between sensor signal output and loading pressure designed with different structural parameters was revealed, and the structure of tactile sensor was optimized. The experimental data showed that the sensor had good sensitivity (0.44 kPa^?1) and low detection limit (2.6 Pa), the response time was 40 ms, the maximum hysteresis error was 6.7% The sensor exhibits excellent stability and repeatability during 2 400 cycles of loading/unloading, and it can be extended to "skin" arrays of different sizes and shapes, the precise perception of the manipulator and the monitoring of motion postures of the human body were realized.