光电-静电复合驱动器的驱动性能

基于镧改性锆钛酸铅陶瓷(PLZT)的光电效应，提出具有倾斜下电极的新型光电-静电复合驱动器，通过闭环控制仿真研究该驱动器的驱动性能. 构建光照和光停阶段光电-静电复合驱动器的数学模型，对所构建的光生电压数学模型进行参数识别. 建立光电-静电复合驱动器输出位移的闭环控制模型，对不同辐射照度下具有不同倾斜角下电极的驱动器进行位移闭环控制仿真分析. 结果表明，当目标位移和辐射照度一致时，具有倾斜下电极结构的光电-静电复合驱动器输出位移的响应时间约为平行下电极结构的45%. 光电-静电复合驱动器输出位移的响应时间与辐射照度和下电极倾斜角成正相关变化，输出位移的控制精度与辐射照度和下电极倾斜角成反相关变化.

Driving performance of photovoltaic-electrostatic hybrid actuator

A novel photovoltaic-electrostatic hybrid actuator with a slant lower electrode was proposed based on the photovoltaic effect of lead lanthanum zirconate titanate (PLZT), and the driving performance was analyzed through the closed-loop control simulation. The mathematical model of photovoltaic-electrostatic hybrid actuator during the illumination and non-illumination phase was established, and the parameters of the mathematical model were identified. Then the closed-loop control model of the output displacement of photovoltaic-electrostatic hybrid actuator was constructed, and the displacement closed-loop control simulation analysis of actuator with different slant angles under different light intensities was conducted. Results showed that the response time of the output displacement for photovoltaic-electrostatic hybrid actuator with a slant lower electrode was about 45% of that of the parallel lower electrode in condition of the same target displacement and light intensity. The response time of the output displacement for photovoltaic-electrostatic hybrid actuator was positively correlated with the light intensity and the slant angle of the lower electrode, while the control accuracy of the output displacement was inversely correlated with the light intensity and the slant angle of the lower electrode.