| 纳米电子器件与纳米电子技术 |
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| 引用本文： | 沈海军,史友进.纳米电子器件与纳米电子技术[J].微纳电子技术,2004,41(6):14-19. |
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| 作者姓名： | 沈海军 史友进 |
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| 作者单位： | 南京航空航天大学航空宇航学院,江苏,南京,210016 |
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| 摘 要： | 介绍了纳米电子器件与纳米电子技术的概念以及纳米电子器件的分类;综述了现有的光刻、外延、SPM、特种精细加工等相关的纳米电子器件制备与加工技术;阐述了纳米电子技术中急需解决的若干关键问题。
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| 关 键 词： | 纳米电子器件 纳米电子技术 纳米器件加工 |
| 文章编号： | 1671-4776(2004)06-0014-06 |
| 修稿时间： | 2003年11月17 |
Nano-electronic components and nano-electronic technology |
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| SHEN Hai-jun,SHI You-jin.Nano-electronic components and nano-electronic technology[J].Micronanoelectronic Technology,2004,41(6):14-19. |
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| Authors: | SHEN Hai-jun SHI You-jin |
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| Abstract: | The concept and classification of nano-electronic component and nano-electronic technology are introduced,and the fabrication technologies of nano-electronic components,such as lithography,epitaxial growth and SPM,are reported. At last some impending problems on nano-electronic technology are listed as well. It should be beneficial for readers to comprehend nano-electronic components and nano-electronic technology. |
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| Keywords: | nano-electronic components nano-electronic technology fabrication of nano-electronic components |
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