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Revisiting micro hot-embossing with moulds in non-conventional materials |
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| Authors: | Chantal Khan Malek Jean-René Coudevylle Jean-Claude Jeannot Roland Duffait |
| Affiliation: | (1) Department LPMO, CNRS UMR 6174, FEMTO-ST, 32 Avenue de l’Observatoire, 25044 Besancon Cedex, France;(2) Centre de Transfert en Micro et Nanotechnologies (CTMN), 39 Avenue de l’Observatoire, BP 1445, 25007 Besancon Cedex 3, France |
| Abstract: | Manufacturing moulds in non-metallic tooling materials using non-conventional structuring techniques is explored for rapid and/or alternative tooling for hot-embossing of polymers. Some challenges and advantages of producing embossing tools by deep reactive ion etching in silicon and/or replica-casting in poly(dimethylsiloxane) and utilizing them in the replication process are highlighted. |
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