Ozone Yields from Oxygen Irradiated at 193 nm

The use of ArF laser radiation at wavelength 193 nm to generate ozone from various pressures of oxygen gases was investigated. Kinetic results were interpreted from molecular spectroscopy and dynamics points of view. The 193 nm radiation can dissociate both oxygen molecules and ozone to produce oxygen atoms. This is an essential process in ozone generation. In this investigation, we focused on the mechanisms that ozone dissociates into three oxygen atoms or vibrationally excited oxygen molecules. The above mechanisms imply a potential process to improve the efficiency of ozone generation.