| 基于有限元的电容临近传感器研究 |
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| 引用本文： | 李晓钰,陈向东,姚尧,谢睿. 基于有限元的电容临近传感器研究[J]. 传感器与微系统, 2010, 29(8) |
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| 作者姓名： | 李晓钰 陈向东 姚尧 谢睿 |
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| 作者单位： | 西南交通大学信息科学与技术学院;成都信息工程学院通信工程学院; |
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| 基金项目： | 国家自然科学基金资助项目 |
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| 摘 要： | 建立了电容临近传感器的三维仿真数学模型,用FEA对不同参数的传感器进行了仿真,比较分析了被测物距离、电极宽度、电极长度间隙比等对传感器灵敏度的影响,并与理论计算进行比较,结果表明:测量系统的灵敏度与电极宽度和电极长度间隙比近似成正比,与被测物距离近似成反比.该研究对电容临近传感器的结构设计有指导意义.
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| 关 键 词： | 电容临近传感器 有限成分分析 三维仿真 |
Research on capacitive proximity sensor based on FEA |
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| LI Xiao-yu,CHEN Xiang-dong,YAO Yao,XIE Rui. Research on capacitive proximity sensor based on FEA[J]. Transducer and Microsystem Technology, 2010, 29(8) |
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| Authors: | LI Xiao-yu CHEN Xiang-dong YAO Yao XIE Rui |
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| Affiliation: | LI Xiao-yu1,CHEN Xiang-dong1,YAO Yao1,XIE Rui2(1.School of Information Science & Technology,Southwest Jiaotong University,Chengdu 610031,China,2.Chengdu University of Information Technology,School of Communication Engineering,Chengdu 610225,China) |
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| Abstract: | A three dimensional finite element model for the capacitive proximity sensor is developed.A simulation of different parameters of capacitive sensors has been carried out using FEA.The influence of distance of measured-object,width of electrode and length gap ratio of electrode on sensitivity of sensor and compared with theoretical data.The results show that the sensitivity of the sensor is direct ratio to the width,and the length and gap ratio of electrode,meanwhile,it is inverse ratio to the distance of me... |
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| Keywords: | capacitive proximity sensor finite element analysis(FEA) 3-D simulation |
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