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| DLC膜在磨损、表面改性及力电耦合作用下损伤特性 | |
| 引用本文： | 朱守星,朱世根,季诚昌,丁建宁.DLC膜在磨损、表面改性及力电耦合作用下损伤特性[J].材料科学与工艺,2006,14(5):466-469. |
| 作者姓名： | 朱守星 朱世根 季诚昌 丁建宁 |
| 作者单位： | 1. 东华大学,机械工程学院,上海,200051 2. 东华大学,材料科学与工程学院,上海,200051 3. 江苏大学,机械工程学院,江苏,镇江,212013 |
| 基金项目： | 上海市纳米科技专项基金 |
| 摘 要： | 为评价超薄类金刚石（DLC）膜在使用过程中的安全状况，利用原子力显微镜（AFM）的多模式功能，从磨损、表面改性、力电失效3个方面对DLC膜进行了试验研究．研究结果表明：相同法向力作用在不同厚度薄膜的磨损深度不同；对DLC膜的形貌和电学特性进行比较发现，磨损区域导电性比未磨损区域强；在厚度为64．09nm薄膜施加正向25V电场作用下，当针尖作用在表面的压力超过一定临界压力（375nN）之后，薄膜发生击穿，形成凹坑。 |
| 关 键 词： | 表面改性 力电耦合 |
| 文章编号： | 1005-0299(2006)05-0466-04 |
| 收稿时间： | 2004-06-08 |
| 修稿时间： | 2004年6月8日 |
Surface reliability characteristic of DLC films under wear, surface modification and mechatronic coupling |
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| ZHU Shou-xing,ZHU Shi-gen,JI Cheng-chang,DING Jian-ning.Surface reliability characteristic of DLC films under wear, surface modification and mechatronic coupling[J].Materials Science and Technology,2006,14(5):466-469. | |
| Authors: | ZHU Shou-xing ZHU Shi-gen JI Cheng-chang DING Jian-ning |
| Affiliation: | 1. School of Mechanical Engineering, Donghua University, Shanghai 200051, China, 2. School of Materials Science and Engineering, Donghua University, Shanghai 200051 ,China; 3. School of Mechanical Engineering, Jiangsu University, Zhenjiang 212013, China |
| Abstract: | In order to estimate the reliability of the ultra thin DLC films, wear, surface modification and mechatronic coupling based on multimode AFM were studied on the DLC films. Experimental results showed that wear depth under the same load was varied with different thick films by the contact AFM. It also indicated that conductivity of worn area was higher than unworn through topography and electrical characterization by EFM. Mechatronic coupling impact on DLC films by conductive AFM showed that films were broken down and heart-shaped pits formed at the 25 V substrate voltage while loads exceeded a certain critical value 375 nN. |
| Keywords: | AFM DLC |
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