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Antireflection coatings for UV radiation obtained by molecular-beam deposition
Authors:Laux S  Mann K  Granitza B  Kaiser U  Richter W
Abstract:We have developed fluoride antireflection (AR) coatings on MgF(2) substrates for a wavelength of 248 nm by molecular-beam deposition. Transmission and laser-induced damage threshold of the samples were measured and atomic force microscope (AFM) investigations were carried out. We compare a 14-layer design for AR coatings with sublayer thicknesses of 12 nm with a conventional two-layer design with quarter-wavelength thicknesses. The laser-induced damage threshold of the 14-layer coating is slightly higher than that of the two-layer coating. The AFM surface images show that the 14-layer coating has a smoother surface than the two-layer coating.
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