Laser Synthesis of Low-Agglomerated Submicrometer Silicon Nitride Powders from Chlorinated Silanes |
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| Authors: | Robert A Bauer Johanna G M Becht F Einar Kruis Brian Scarlett Joop Schoonman |
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| Affiliation: | Department of Applied Chemistry and Department of Chemical Engineering, Delft University of Technology, 2600 GA Delft, The Netherlands |
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| Abstract: | The laser chemical vapor precipitation of Si3N4 powder from mixtures of SiH2Cl2 and NH3 has been studied. The reactant gases were mixed at different heights with respect to the laser beam, thus preventing low-temperature reactions and agglomeration of the produced particles. The morphology and the size of the particles formed are dependent on the injection height of NH3 into the silicon reactant gas stream. Particle diameters are typically between 15 and 110 nm. |
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| Keywords: | lasers synthesis sintering powders silanes |
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