Integrated optics processing: uses of an EDTA etch solution |
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| Authors: | Murphy E.J. Minford W.J. Rice T.C. |
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| Affiliation: | AT&T Bell Laboratories, Allentown, USA; |
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| Abstract: | A new processing step with important implications in LiNbO3 waveguide device fabrication is reported. The combination of an EDTA solution and photomasking is used to etch titanium and form novel waveguide structures allowing local control of the propagation constant and optical mode profile. Several applications are discussed. |
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