| C 掺杂方式对 TiAlSiN 膜层组织及性能的影响 |
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| 引用本文： | 王彦峰,李争显,华云峰,王宝云,杜继红.C 掺杂方式对 TiAlSiN 膜层组织及性能的影响[J].表面技术,2013,42(4):32-34,38. |
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| 作者姓名： | 王彦峰 李争显 华云峰 王宝云 杜继红 |
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| 作者单位： | 西北有色金属研究院 |
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| 摘 要： | 采用电弧离子镀与磁控溅射联合沉积技术,以不同的C掺杂方式在高速钢基体表面制备了C/TiAlSiN多元复合硬质膜层,对膜层的成分、组织结构、显微硬度及摩擦磨损性能进行了表征,并与相同条件下制备的未掺杂TiAlSiN膜进行了对比。结果表明,不同的掺杂方式使得膜层的组织与性能不同,在TiAlSiN硬质膜层的制备过程中实施C掺杂,能够显著优化该膜层体系的组织结构及显微硬度,并大大改善其摩擦磨损性能。
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| 关 键 词： | C掺杂 TiAlSiN硬质膜层 显微组织 摩擦性能 |
| 收稿时间： | 2013/4/26 0:00:00 |
| 修稿时间： | 2013/5/20 0:00:00 |
Influence of C Incorporation Modes on the TiAlSiN Coating' s Microstructure and Properties |
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| WANG Yan-feng,LI Zheng-xian,HUA Yun-feng,WANG Bao-yun and DU Ji-hong.Influence of C Incorporation Modes on the TiAlSiN Coating' s Microstructure and Properties[J].Surface Technology,2013,42(4):32-34,38. |
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| Authors: | WANG Yan-feng LI Zheng-xian HUA Yun-feng WANG Bao-yun and DU Ji-hong |
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| Affiliation: | (Northwest Institute for Nonferrous Metal Research,Xi’an 710016,China) |
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| Abstract: | A combination of arc and magnetron sputtering deposition technology was used to synthesize the C / TiAlSiN hard coatings with different C incorporation modes on the high-speed steel substrates. The coating ' s composition, microstructure, microhardness and wearing properties were studied and compared with that of TiAlSiN coatings which has none-C incorporation. It was found that the coatings had different microstructure and properties with different C incorporation mode. The incorporation of C during the TiAlSiN coating synthesis was very useful to optimize the coating's microstructure and micro hardness,and also good for its wearing properties. |
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| Keywords: | C incorporatin TiAlSiN hard coating microstructure wearing properties |
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