制造纳米电子器件的技术途径

目的 为发展纳米电子年及纳米电子学技术寻找有效途径。方法 对目前制造纳米电子器件的主要途径，例如基于三束的光刻加工技术、分子组装与纳米微粒排列技术、扫描力探针加工技术等进行了概略的介绍。讨论了各种方法所存在的优势与限制。结果 对基于分子组装与纳米光刻的纳料制造技术给予很大的重视。结论 认为综合若干种技术之长可能是我们目前实现特定纳料器件制造的有效途径。

The Ways to Fabrication of Nano Electron Devices

Aim\ To search for the suitable ways to develop the nanoscale electronic devices and the techniques of nano electronics. Methods\ The brief introduction of main techniques, by which the nano electronic devices could be fabricated, is given. These techniques include molecular assembly, arrangement of nano particles, scanning force microscopy fabrication and nano lithography based on photon beam, electron beam, and ion beam. The advantage and limitation of these methods are also discussed. Results\ The combination of molecular self assembly and nano lithography should be more important. Conclusion\ It is suggested that the better way for realization of nano electronic devices under our present conditions should be combination of two or three methods mentioned above.