| 热丝辐射距离与甲烷浓度对CVD金刚石薄膜的影响 |
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| 引用本文： | 魏秋平,田孟昆,马莉,陈中,刘培植,余志明. 热丝辐射距离与甲烷浓度对CVD金刚石薄膜的影响[J]. 粉末冶金材料科学与工程, 2011, 16(2): 187-195 |
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| 作者姓名： | 魏秋平 田孟昆 马莉 陈中 刘培植 余志明 |
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| 作者单位： | 魏秋平,WEI Qiu-ping(中南大学材料科学与工程学院,长沙,410083;中南大学粉末冶金国家重点实验室,长沙,410083);田孟昆,陈中,刘培植,余志明,TIAN Meng-kun,CHEN Zhong,LIU Pei-zhi,YU Zhi-ming(中南大学材料科学与工程学院,长沙,410083);马莉,MA Li(中南大学粉末冶金国家重点实验室,长沙,410083) |
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| 基金项目： | 粉末冶金国家重点实验室开放基金资助项目，湖南省研究生创新基金资助项目，中南大学贵重仪器开放共享基金资助项目，中南大学优秀博士论文扶持基金资助项目 |
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| 摘 要： | 以H2和CH4作为反应气体,采用热丝化学气相沉积法(Hot filaments chemical vapor deposition,HFCVD),在WC-3%Co条状平板上制备金刚石薄膜,利用扫描电镜(SEM)、X射线衍射(XRD)、激光拉曼光谱(Raman)和洛氏硬度仪分析薄膜的形貌、结构、成分和附着性能,研究热丝辐...
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| 关 键 词： | 金刚石薄膜 甲烷体积分数 热丝辐射距离 拉曼光谱 热丝化学气相沉积 |
Effects of radiation distance of hot-filament and methane concentration on diamond films |
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| WEI Qiu-ping,TIAN Meng-kun,MA Li,CHEN Zhong,LIU Pei-zhi,YU Zhi-ming. Effects of radiation distance of hot-filament and methane concentration on diamond films[J]. materials science and engineering of powder metallurgy, 2011, 16(2): 187-195 |
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| Authors: | WEI Qiu-ping TIAN Meng-kun MA Li CHEN Zhong LIU Pei-zhi YU Zhi-ming |
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| Affiliation: | WEI Qiu-ping1,2,TIAN Meng-kun1,MA Li2,CHEN Zhong1,LIU Pei-zhi1,YU Zhi-ming1 (1.School of Materials Science and Engineering,Central South University,Changsha 410083,China,2.State Key Laboratory of Powder Metallurgy,China) |
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| Abstract: | Diamond films were deposited on WC-3%Co substrates with different methane volume fraction by hot filaments chemical vapor deposition(HFCVD).The effects of the radiation distance of hot-filament and methane volume fraction on the morphology,structure and composition of diamond films grown by HFCVD and the adhesion of such films to substrate were studied.The surface and cross-section morphology of diamond films were observed by SEM,the structure of films was investigated using Laser Raman spectrum,and the adh... |
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| Keywords: | diamond films methane volume fraction radiation distance of filament Raman spectra HFCVD |
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