Packaged AlGaAs waveguide modulator array at 830 nm wavelength

We report a fully packaged AlGaAs waveguide modulator array with four individually addressable elements operating at approximately 830 nm wavelength and a clock speed of 1 GHz. The modulators rely largely on the linear electro-optic effect for operation, and have been packaged with an E/D MESFET driver with complementary 3.5 V outputs, and a thick-film ceramic bias network. The device is compact, using multimode interference devices for on-chip splitters and combiners and has a 4 mm electrode length. Extinction ratios in excess of 10 dB have been demonstrated over a temperature range from room temperature to 143°C. The modulator array has been packaged with a remote high power (100 mW) diode laser using stable single mode input coupling, while the modulator output is packaged with a multimode fiber array of 52.5 μm core diameter