| OEM硅压力传感器温度补偿技术研究 |
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| 引用本文： | 彭春文,朱红杰,付世平,刘宏伟,徐淑霞.OEM硅压力传感器温度补偿技术研究[J].仪表技术与传感器,2000(7):9-11. |
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| 作者姓名： | 彭春文 朱红杰 付世平 刘宏伟 徐淑霞 |
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| 作者单位： | 沈阳仪器仪表工艺研究所,沈阳市,110043 |
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| 摘 要： | ＯＥＭ硅压力传感器除具有普通扩散硅压力传感器的灵敏度高、稳定性好等优点外，还具有体积小、人格低廉易于批量生产等特点，成为市场的主导产品，文中对多种ＯＥＭ硅压力传感器的温度特性曲线及其补偿电路进行测试、比较、分析，对传感器温度曲线可补偿性进行研究，实现了低温度系数厚膜网络温度补偿。
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| 关 键 词： | 硅压力传感器 温度补偿 温度漂移 |
Study on Temperature Compensation Technique of OEM Si-Pressure Sensor |
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| Peng Chunwen,Zhu Hongjie,Fu Shiping,Liu Hongwei,Xu Shuxia.Study on Temperature Compensation Technique of OEM Si-Pressure Sensor[J].Instrument Technique and Sensor,2000(7):9-11. |
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| Authors: | Peng Chunwen Zhu Hongjie Fu Shiping Liu Hongwei Xu Shuxia |
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| Affiliation: | Peng Chunwen ,Zhu Hongjie ,Fu
Shiping ,Liu Hongwei ,Xu Shuxia
(Shenyang Institute of Insmmaentation Technology, Shenyang 110043) |
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| Abstract: | OEM silicon pressure sensor has become the dominant product in industry because of its aduantages such as excellent sensitivity and stability,small size,low cost and ease of mass production.In this paper,the temperature property of OEM silicon pressure sensor and its compensation circuit is discussed and analysed,and a method of temperature compeasation is presented. |
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| Keywords: | Silicon Pressure Sensor Temperature Compensation |
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