In situ IR pyrometric analysis during thermal treatment in air of TiOxNy coatings

IR pyrometry is an original diagnostic tool for in situ analysis of surface transformations of coatings or bulk materials during the thermal treatment under reactive atmosphere such as high temperature oxidation. Significant oscillations of the pyrometric signal were observed during annealing in air of TiO_1.5N_0.5 coatings in the temperature range 673-823 K. This is due to interferences resulting from multi-reflections at the interfaces of a transparent growing film. This reveals the formation of a TiO₂ thin film on the top of the TiO_1.5N_0.5 coating. Modeling of the time dependence of the IR pyrometric signal allows the determination of the oxide layer thickness, transformation rate and optical properties of the films under the growth conditions. The progressive oxidation of a compact amorphous TiO_1.5N_0.5 coating from the external surface to the substrate interface was supported by SIMS, XRD and reflectance analyses.