| α-SiC/α-Si PIN异质结集成型全色色敏元件的研究 |
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| 引用本文： | 徐重阳,王长安,周雪梅,邹雪城,赵伯芳.α-SiC/α-Si PIN异质结集成型全色色敏元件的研究[J].电子学报,1992(5). |
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| 作者姓名： | 徐重阳 王长安 周雪梅 邹雪城 赵伯芳 |
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| 作者单位： | 华中理工大学固体电子学系，华中理工大学固体电子学系，华中理工大学固体电子学系，华中理工大学固体电子学系，华中理工大学固体电子学系 武汉 430074，武汉 430074，武汉 430074，武汉 430074，武汉 430074 |
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| 摘 要： | 本文研究一种新型a-SiC/a-Si PIN异质结集成型全色色敏元件的制备工艺和结构,详细讨论了色敏元件的优化设计以及响应特性、暗电流等性能。实验结果表明,由于采用宽带隙的a-SiC窗口层和分离反应室的PECVD工艺,使色敏元件的灵敏度和暗电流特性得到了明显改善。
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| 关 键 词： | 非晶硅 异质结 最佳化设计 色敏元件 |
The Study of Integrated Type Full Color Sensor with a-SiC/a-Si PIN Heterojunction |
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| Xu Zhongyang,Wang Changan,Zhou Xuemei,Zou Xuecheng and Zhao Bofang.The Study of Integrated Type Full Color Sensor with a-SiC/a-Si PIN Heterojunction[J].Acta Electronica Sinica,1992(5). |
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| Authors: | Xu Zhongyang Wang Changan Zhou Xuemei Zou Xuecheng and Zhao Bofang |
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| Abstract: | In this paper, the integrated type full color sensor with a-SiC/a-Si PIN hete-rojunction is investigated. The preparation and structure of this new film color sensor are given. The optimum design and device chracteristics, such as spectral response and dark current, are discussed. Experimental results show that properties of the color sensor are substantially improved by the wide gap a-SiC window layer and separated reaction chamber method. |
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| Keywords: | Amorphous silicon Heterojunction Optimum design Color sensor |
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