Full field measurement at the micro-scale using micro-interferometry

This paper presents micro-interferometry as a measurement technique to extract temperature profiles and/or mass transfer gradients rapidly and locally in micro-devices. Interferometry quantifies the phase change between two or more coherent light beams induced by temperature and/or mass concentration. Previous work has shown that temporal noise is a limiting factor in microscale applications. This paper examines phase stepping and heterodyne phase retrieval techniques with both CCD and CMOS cameras. CMOS cameras are examined owing to the high speed at which images can be acquired which is particularly relevant to heterodyne methods. It is found that heterodyne retrieval is five times better than phase stepping being limited to 0.01 rad or λ/628. This is twice the theoretical limit of λ/1,000. The technique is demonstrated for mixing in a T-junction with a 500 μm square channel and compared favourably to a theoretical prediction from the literature. Further issues regarding application to temperature measurements are discussed.