| 触点式微型光热驱动器设计及实验研究 |
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| 引用本文： | 王旭龙琦,刘超,张冬仙.触点式微型光热驱动器设计及实验研究[J].光学仪器,2008,30(4):46-49. |
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| 作者姓名： | 王旭龙琦 刘超 张冬仙 |
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| 作者单位： | 浙江大学,现代光学仪器国家重点实验室,浙江,杭州,310027 |
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| 基金项目： | 国家高技术研究发展计划(863计划) |
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| 摘 要： | 随着微电机系统(MEMS)在众多领域的广泛应用,各种形式的微型驱动器不断得到发展。介绍微尺度光热膨胀与光热微驱动的原理,设计与加工制作了基本型和优化型触点式微型光热驱动器,开展了光热微驱动的实验研究,证明了光热微驱动的可行性,并验证了优化型触点式微型光热驱动器的优化性能。
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| 关 键 词： | 触点式 光热膨胀 优化型 微型光热驱动器 |
Design and research of the point-contact optothermal microactuator |
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| WANG Xulongqi,LIU Chao,ZHANG Dongxian.Design and research of the point-contact optothermal microactuator[J].Optical Instruments,2008,30(4):46-49. |
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| Authors: | WANG Xulongqi LIU Chao ZHANG Dongxian |
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| Abstract: | As the applications of micro electro-mechanical systems(MEMS) become wider in various fields,sorts of microactuators have chances to develop uninterruptedly.The principle of micro optothermal expansion and optothermal microactuator are introduced.We designed and fabricated a basic point-contact optothermal microactuator,and further developed an optimized one.Experiments were carried out to prove the feasibility of optothermal micro-actuation.The characteristic elegances of the optimized point-contact optothermal microactuator were further demonstrated through experiments. |
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| Keywords: | point-contact optothermal expansion optimized optothermal microactuator |
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