| Equivalent Circuit Analysis of an RF Integrated Inductor with Ferrite Thin-Film |
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| 引用本文： | Ren Tianling,Yang Chen,Liu Feng,Liu Litian,Wang A Z,Zhang Xiao. Equivalent Circuit Analysis of an RF Integrated Inductor with Ferrite Thin-Film[J]. 半导体学报, 2006, 27(3): 511-515 |
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| 作者姓名： | Ren Tianling Yang Chen Liu Feng Liu Litian Wang A Z Zhang Xiao |
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| 作者单位： | 清华大学微电子学研究所，北京 100084;清华大学微电子学研究所，北京 100085;清华大学微电子学研究所，北京 100086;清华大学微电子学研究所，北京 100087;伊利诺理工学院电气与计算机工程系，芝加哥 IL 60616，美国;清华大学电子工程系，北京 100084 |
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| 摘 要： | 针对已制作并发表的一种新型铁氧体磁膜结构射频集成微电感进行了等效电路分析.阐述了磁性铁氧体薄膜对电感的感值(L)和品质因数(Q)的增强作用.对射频测试结果进行了电路元件参数提取.结果表明,与空气芯无磁膜微电感相比,磁膜结构微电感的L和Q在2GHz处分别提高了17%和40%.等效电路分析和测试结果均证明了铁氧体薄膜的引入对增强射频集成微电感性能的作用显著.
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| 关 键 词： | 电感 等效电路 铁氧体薄膜 射频集成电路 inductor equivalent circuit ferrite thin-film RF ICs 铁氧体 磁膜 集成 微电感 电路分析 Ferrite Integrated Inductor Circuit Analysis equivalent circuit circuit analysis test results significant performance integration reference magnetic film element parameters measurements integrated inductor |
| 文章编号： | 0253-4177(2006)03-0511-05 |
| 收稿时间： | 2005-11-07 |
| 修稿时间： | 2005-11-07 |
Equivalent Circuit Analysis of an RF Integrated Inductor with Ferrite Thin-Film |
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| Ren Tianling,Yang Chen,Liu Feng,Liu Litian,Wang A Z and Zhang Xiao. Equivalent Circuit Analysis of an RF Integrated Inductor with Ferrite Thin-Film[J]. Chinese Journal of Semiconductors, 2006, 27(3): 511-515 |
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| Authors: | Ren Tianling Yang Chen Liu Feng Liu Litian Wang A Z Zhang Xiao |
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| Affiliation: | Institute of Microelectronics,Tsinghua University,Beijing 100084,China;Institute of Microelectronics,Tsinghua University,Beijing 100085,China;Institute of Microelectronics,Tsinghua University,Beijing 100086,China;Institute of Microelectronics,Tsinghua University,Beijing 100087,China;Department of Electrical and Computer Engineering,Illinois Institute of Technology,Chicago IL 60616,USA;Department of Electronic Engineering,Tsinghua University,Beijing 100084,China |
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| Abstract: | An equivalent circuit for a novel RF integrated inductor with ferrite thin-film is derived.The enhancement of the magnetic ferrite thin-film on the inductance (L) and quality factor (Q) of the inductor is analyzed.Circuit element parameters are extracted from RF measurements.Compared with the reference air-core inductor without magnetic film,L and Q of the ferrite thin-film inductor are 17% and 40% higher at 2GHz,respectively.Both the equivalent circuit analysis and test results demonstrate significant enhancement of the performance of RF integration inductors by ferrite thin-film integration. |
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| Keywords: | inductor equivalent circuit ferrite thin-film RF ICs |
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