太阳能级单晶炉热场的适应性改造研究

在JRDL-900型太阳能级单晶炉上安装自行设计的350 mm(14英寸)密闭式热场,替换原有的500 mm(20英寸)热场,使该单晶炉具备了半导体级75~150 mm(3~6英寸)常用硅单晶的生长条件。根据单晶炉实际情况,重新设定了单晶生长控制程序,实现半导体级硅单晶等径生长自动控制。在拉晶实验过程中,发现并解决了影响单晶生长的设备和技术问题,成功实现了半导体级100 mm(4英寸)硅单晶的生长,对单晶成品的相应参数测试表明,使用该类太阳能级单晶炉,通过炉体和热场的改进,能够实现半导体级产品的生产,可有效利用闲置设备和资源,并为今后该类型的大规模改造和生产奠定了技术基础。

Research of the Solar Furnace Hotzone Modification

In this article,a hotzone m odification m ethod had been introduced to use the 14inch closed hotzone instead of the initiate 20inch hotzone .A fter hotzone m odification , the JRDL-900 Solar furnace can use for sem iconductor crystal production.A ccording to the accuracy m easurem ent of the furnace dim ension ,the CAD m ethod had been used to design the new hotzone and shield .Several crystalgrow ing experim entare running to show if the m odification is successful.D uring the grow ing experim ent,som e furnace and technicalproblem s have been found and solved.Finally we gotthe 4inch silicon ingotand did some inspection for crystal param eter.The inspection result show that the crytal ingotcan satisfy the need ofthe sem iconductorindustry.The hotzone and sop m odification can use the solarfurnace in otherw ay w hich enhance the efficiency ofequipm ent,and the technique m ethod can be used forthe m ore scale .