Perovskite‐Induced Ultrasensitive and Highly Stable Humidity Sensor Systems Prepared by Aerosol Deposition at Room Temperature

A new capacitive‐type humidity sensor is proposed using novel materials and fabrication process for practical applications in sensitive environments and cost‐effective functional devices that require ultrasensing performances. Metal halide perovskites (CsPbBr₃ and CsPb₂Br₅) combined with diverse ceramics (Al₂O₃, TiO₂, and BaTiO₃) are selected as sensing materials for the first time, and nanocomposite powders are deposited by aerosol deposition (AD) process. A state‐of‐the‐art CsPb₂Br₅/BaTiO₃ nanocomposite humidity sensor prepared by AD process exhibits a significant increase in humidity sensing compared with CsPbBr₃/Al₂O₃ and CsPbBr₃/TiO₂ sensors. An outstanding humidity sensitivity (21426 pF RH%^?1) with superior linearity (0.991), fast response/recovery time (5 s), low hysteresis of 1.7%, and excellent stability in a wide range of relative humidity is obtained owing to a highly porous structure, effective charge separation, and water‐resistant characteristics of CsPb₂Br₅. Notably, this unprecedented result is obtained via a simple one‐step AD process within a few minutes at room temperature without any auxiliary treatment. The synergetic combination of AD technique and perovskite‐based nanocomposite can be potentially applied toward the development of multifunctional sensing devices.