| Research on Surface Modification of 96 Al2O3 by Ni Ion Implantation |
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| 引用本文： | WANG Xiao-hong SUN Zhi ZHU Xin WANG Zhen-zhong. Research on Surface Modification of 96 Al2O3 by Ni Ion Implantation[J]. 中国矿业大学学报(英文版), 2006, 16(3): 261-265 |
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| 作者姓名： | WANG Xiao-hong SUN Zhi ZHU Xin WANG Zhen-zhong |
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| 作者单位： | School of Materials Science and Engineering, China University of Mining ＆ Technology, Xuzhou, Jiangsu 221008, China |
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| 摘 要： | A matrix of 96 Al2O3 ceramics was implanted with Ni ion of different dosages and energies using a MEVVA implanter. Then metallic structures of copper were made on the implanted ceramics, by using selective electroless copper plating. In addition, the characteristics and microstructure of the implanted layer were studied by using the SEM, RBS and XPS. The results show that： 1） the implanted Ni exits as Ni^2, Ni^2＋, and Ni^3＋ in the surface of Al2O3 and metal Ni particles precipitate on ceramics during implantation; 2） the concentration of Ni submits to the Gauss distribution along the direction of implantation on the surface of Al2O3 and high Ni concentration on the surface can be obtained if the Ni is implanted with low energy and a high dosage and 3） Ni ion implantation can activate the surface of Al2O3 and induce electroless copper plating on the ceramics.
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| 关 键 词： | 离子注入 氧化铝陶瓷 镍 表面改性 |
| 收稿时间： | 2005-12-10 |
Research on Surface Modification of 96 Al2O3 by Ni Ion Implantation |
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| WANG Xiao-hong,SUN Zhi,ZHU Xin,WANG Zhen-zhong. Research on Surface Modification of 96 Al2O3 by Ni Ion Implantation[J]. Journal of China University of Mining and Technology, 2006, 16(3): 261-265 |
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| Authors: | WANG Xiao-hong SUN Zhi ZHU Xin WANG Zhen-zhong |
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| Abstract: | A matrix of 96 Al2O3 ceramics was implanted with Ni ion of different dosages and energies using a MEVVA implanter. Then metallic structures of copper were made on the implanted ceramics, by using selective electroless copper plating. In addition, the characteristics and microstructure of the implanted layer were studied by using the SEM, RBS and XPS. The results show that: 1) the implanted Ni exits as Ni0 , Ni2+, and Ni3+ in the surface of Al2O3 and metal Ni particles precipitate on ceramics during implantation; 2) the concentration of Ni submits to the Gauss distribution along the direction of implantation on the surface of Al2O3 and high Ni concentration on the surface can be obtained if the Ni is implanted with low energy and a high dosage and 3) Ni ion implantation can activate the surface of Al2O3 and induce electroless copper plating on the ceramics. |
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| Keywords: | ion implantation Al2O3 ceramics Ni chemical states |
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