| Sol-gel法制备PZT铁电薄膜的疲劳影响因素研究进展 |
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| 引用本文： | 张兴国,刘军,陈春,胡道甫. Sol-gel法制备PZT铁电薄膜的疲劳影响因素研究进展[J]. 材料导报, 2004, 18(10): 76-78 |
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| 作者姓名： | 张兴国 刘军 陈春 胡道甫 |
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| 作者单位： | 江苏大学材料科学与工程学院,镇江,212013;江苏大学材料科学与工程学院,镇江,212013;江苏大学材料科学与工程学院,镇江,212013;江苏大学材料科学与工程学院,镇江,212013 |
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| 摘 要： | 简述了PZT铁电薄膜在制备和应用当中遇到的问题.围绕提高薄膜的疲劳性能,介绍了PZT铁电薄膜近年来在热处理、底电极、过渡层和掺杂等方面的研究进展,并分析了它们对材料电性能和疲劳性能的影响.最后提出了展望.
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| 关 键 词： | PZT 铁电性 溶胶凝胶 掺杂 |
Progress in Research on Fatigue Factors of PZT Ferroelectric Thin Films by Sol-gel Method |
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| ZHENG Xingguo LIU Jun CHEN Chun HU Daofu. Progress in Research on Fatigue Factors of PZT Ferroelectric Thin Films by Sol-gel Method[J]. Materials Review, 2004, 18(10): 76-78 |
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| Authors: | ZHENG Xingguo LIU Jun CHEN Chun HU Daofu |
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| Abstract: | A review is made on the questions that confronted with PZT ferroelectric films during the preparation and application. In order to improve the film's fatigue performance, recent research on heat treatment, bottom electrode, transition layer and doping is discussed. Their influence on the electric and fatigue performances of the film is analyzed and the prospect is also discussed in the end. |
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| Keywords: | PZT |
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