| 电感耦合式等离子清洗系统及其在微波管制造中的应用 |
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| 引用本文： | 张吉峰,王承章. 电感耦合式等离子清洗系统及其在微波管制造中的应用[J]. 真空电子技术, 2008, 0(1): 45-48 |
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| 作者姓名： | 张吉峰 王承章 |
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| 作者单位： | 北京真空电子技术总公司,北京,100016 |
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| 摘 要： | 介绍了电感耦合式等离子清洗系统的原理、结构、组成,以一台已经试制成功的清洗设备为例,介绍了典型设备的系统构成、技术指标以及应用于微波管制造过程中所收到的良好效果。
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| 关 键 词： | 电感耦合式 等离子体 清洗 |
| 文章编号： | 1002-8935(2008)01-0045-04 |
| 修稿时间： | 2007-07-08 |
An Inductively Coupled Plasma Cleaning System and Its Application in the Manufacture of Microwave Tubes |
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| ZHANG Ji-feng,WANG Cheng-zhang. An Inductively Coupled Plasma Cleaning System and Its Application in the Manufacture of Microwave Tubes[J]. Vacuum Electronics, 2008, 0(1): 45-48 |
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| Authors: | ZHANG Ji-feng WANG Cheng-zhang |
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| Abstract: | This paper introduces the principles,structures and components of an inductively coupled plasma cleaning system.The components and specifications of the typical equipment,which has been suc- cessfully manufactured as an example,are presented.Good results have been obtained when the technolo- gy is used in the manufacturing process of microwave tubes. |
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| Keywords: | Inductive Coupling Plasma Cleaning |
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