Fabrication of biaxially textured magnesium oxide thin films by ion-beam-assisted deposition |
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Authors: | TP Weber B Ma M McNallan |
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Affiliation: | a Energy Technology Division, Argonne National Laboratory, Argonne, IL 60439, USA b Department of Materials Science and Engineering, University of Illinois at Chicago, Chicago, IL 60612, USA |
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Abstract: | Biaxially textured MgO thin films were grown by ion-beam-assisted deposition. The film growth parameters of film thickness, ion-to-atom arrival ratio (r-value), ion beam angle, and ion beam voltage were studied. Film characterization was performed by X-ray diffraction, pole figure analysis, and atomic force microscopy (AFM). Full-width half-maximum (FWHM) of MgO (220) ?-scans and MgO (002) ω-scans, respectively, were used to evaluate in-plane and out-of-plane film texture. MgO (220) ?-scan FWHM of 3.2° and MgO (002) ω-scan FWHM of 1.2° was achieved on amorphous Si3N4-coated Si substrates using a 1500-V ion source oriented at 45° to the substrate normal and an r-value of 0.90. Depositions on metallic substrates yielded MgO (220) ?-scan FWHM values of 5.2° and MgO (002) ω-scan FWHM of 2.5°. Root-mean-square surface roughness of these films as measured by AFM was ≈2.3 nm. |
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Keywords: | 81 15 j 68 55 j |
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