电容式硅微加速度计变换方程的研究

研究了利用硅簿片为敏感元件的电容式加速度计，加速度计的悬臂梁与惯性质量块是一个整体结构，可以消除元件弹性连接的不完善性，而且极板间隙中空气相对介电常数εr的高稳定性是这种电容式传感器的优点之一。给出了敏感元件的实际弯曲函数，分析了其变换方程及非线性，研究表明，在设计电容式硅微加速度计时，只要间隙调制深度在-0.5- 0.5，加速度计的变换函数基本满足线性，得到的变换方程可以作为合理选择电容式加速度计的电极结构参数的理论依据。

Study of Transpositional Equation of Capacitance Silicon Microsture Acceleration Sensor

Capacitance silicon microstructure accelerometer was studied.The cantilever beam and inertial mass of accelerometer were joined together to reduce the shortcoming of the elements joining.The highly stationality of air relative dielectric constant in electrode plate clearance is one of the advantages of the capacitance sensor.Transform equation and its nonlinearity were analyzed,and the bend function of sensitive element was given.Studies results indicate that the transform function of accelerometer was linearity as long as the depth of clearance modulation was kept -0.5 and +0.5.It renders a theoretic bas for choosing rational electrode configuration parameters.