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背面刻蚀对单晶硅太阳电池性能影响的研究
引用本文:杨超,沈鸿烈,吴京波,陈海力,江丰,李斌斌.背面刻蚀对单晶硅太阳电池性能影响的研究[J].电子器件,2011,34(2):125-128.
作者姓名:杨超  沈鸿烈  吴京波  陈海力  江丰  李斌斌
作者单位:南京航空航天大学材料科学与技术学院;南京沙宁申科技开发有限公司;
基金项目:国家高技术研究发展计划(863计划)项目(2006AA03Z219)
摘    要:为了减少太阳电池载流子的背面复合,采用离子束对沉积完SiNx减反射膜后的单面扩散和双面扩散的单晶硅片背面进行刻蚀,研究了刻蚀时间对太阳电池性能的影响.采用标准的太阳电池单片测试仪测试电池性能.发现背面经离子束刻蚀后,单面扩散和双面扩散电池片的并联电阻、开路电压、填充因子和转换效率都有所提高,而串联电阻和短路电流的变化则...

关 键 词:太阳电池  离子束刻蚀  开路电压  填充因子  转换效率

Study of the Influence of Back Side Etching on the Performance of Monocrystalline Silicon Solar Cells
YANG Chao,SHEN Honglie,WU Jingbo,CHENG Haili,JIANG Fen,LI Bingbing.Study of the Influence of Back Side Etching on the Performance of Monocrystalline Silicon Solar Cells[J].Journal of Electron Devices,2011,34(2):125-128.
Authors:YANG Chao  SHEN Honglie  WU Jingbo  CHENG Haili  JIANG Fen  LI Bingbing
Affiliation:YANG Chao1,SHEN Honglie1,WU Jingbo2,CHENG Haili1,JIANG Fen1,LI Bingbing1(1.College of Materials Science & Technology,Nanjing University of Aeronautics and Astronautics,Nanjing 210016,China,2.Nanjing Shiningsun Technology Development Co.,Ltd,Nanjing 211300,China)
Abstract:To reduce the carrier recombination on the rear side of solar cells,this article carried out the ion beam etching on the rear side of single-side diffused and double-side diffused silicon wafers after depositing SiNx anti-reflection coating.The influence of etching time on the performance of solar cells was investigated.The performance of solar cells was measured by a standard solar cell tester.The results showed that the shunt resistance,open circuit voltage,fill factor and efficiency of the solar cells we...
Keywords:solar cells  ion beam etching  open circuit voltage  fill factor  efficiency  
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