Microstructure and thickness dependent magnetic properties of nanogranular Co-Zn-O thin films for microwave applications

Co-based granular thin films with in-plane anisotropy were deposited on Si substrate by magnetron sputtering. The films have a phase structure of Co nanocrystallites and amorphous Zn-O inter-granular phases. The Co nanograins with uniform size of 8-10 nm are evenly distributed in the amorphous matrix. This structure gives the films relatively high resistivities. The as-deposited films with thickness larger than 100 nm have low coercivity (<10 Oe) along both easy and hard directions. The dynamic properties in the frequency range up 5 GHz for the films with various thicknesses have been investigated. High values of permeability (μ′ up to 560 and μ″ up to 1000) and ferromagnetic resonance frequency (FMR) up to 4.1 GHz have been obtained in these films. The FMR frequency decreases with increasing thickness, because of the increases in real and imaginary permeabilities. The high frequency characteristics have complicated dependences on the resistivity, anisotropy field, and magnetization. The microwave properties of Co-Zn-O films can be adjusted in a relatively wide range by changing film thickness, which makes these films promising for absorber applications.