| 扩散炉反应管压力自平衡系统的设计 |
| |
| 引用本文： | 李克,郭立,毛朝斌,陈特超,李健志. 扩散炉反应管压力自平衡系统的设计[J]. 电子工业专用设备, 2012, 41(7): 32-35 |
| |
| 作者姓名： | 李克 郭立 毛朝斌 陈特超 李健志 |
| |
| 作者单位： | 中国电子科技集团公司第四十八研究所,国家光伏装备工程技术研究中心,长沙410111 |
| |
| 摘 要： | 对晶体硅太阳能电池片生产用扩散炉反应管压力平衡系统的要求及原理进行了阐述,由于反应管内气流变化对扩散效果影响很大,本系统根据实际使用经验,对工艺管内压力进行检测,在外围尾气排放不稳定的条件下,对反应管内气体排放进行调节,从而控制管内压力,使管内流速均匀,达到好的扩散效果。
|
| 关 键 词： | 扩散 反应管压力自平衡 尾气控制 |
The Process Tube Pressure Control System Design in Diffusion Furnace for Crystalline Silicon Cells |
| |
| LI Ke,GUO Li,MAO Chaobin,CHEN Techao,LI Jianzhi. The Process Tube Pressure Control System Design in Diffusion Furnace for Crystalline Silicon Cells[J]. Equipment for Electronic Products Marufacturing, 2012, 41(7): 32-35 |
| |
| Authors: | LI Ke GUO Li MAO Chaobin CHEN Techao LI Jianzhi |
| |
| Affiliation: | (The 48th Research Institute of CETC,Changsha 410111,China) |
| |
| Abstract: | The requirements and principle of the process tube pressure control system in diffusion furnace for crystalline silicon cell are introduced.because the flow changes in tube is very large to diffusion effect,according to the practical experience,The system tests the process tube pressure and regulates the exhaust under peripheral system instability,thereby control the pressure in the tube,the tube flow evenly,achieve good diffusion effect. |
| |
| Keywords: | Diffusion Process tube pressure control system Exhaust control |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
|
