| 掩模清洗机加热系统控制及故障排除 |
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| 引用本文： | 陈卓,严剑荫.掩模清洗机加热系统控制及故障排除[J].电子工业专用设备,2012,41(6):39-45. |
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| 作者姓名： | 陈卓 严剑荫 |
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| 作者单位： | 无锡中微掩模电子有限公司,江苏无锡,214035 |
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| 摘 要： | 在集成电路掩模(Mask)生产过程中,清洗机是关系到掩模制板质量的一个重要设备。因为掩模工艺需要使用大量的化学溶剂,并需配置多个加热控制系统,致使清洗设备成为一个故障率高、易损件损坏多的设备。介绍清洗机加热系统控制原理,其中包括Genius I/O、手持监控器、PID控制、电流监控器、安全电路和加热脉冲。对其控制原理及电路进行了解析,最后通过应用实例给出了故障的排除方法。
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| 关 键 词： | 掩模 手持监控器 PID控制 电流监控器 安全电路 加热脉冲 |
Mask Cleaning Machine Heating System Control Troubleshooting |
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| CHEN Zhuo,YAN Jianyin.Mask Cleaning Machine Heating System Control Troubleshooting[J].Equipment for Electronic Products Marufacturing,2012,41(6):39-45. |
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| Authors: | CHEN Zhuo YAN Jianyin |
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| Affiliation: | (Wuxi Zhongwei Mask Electronics co.,Ltd.Wuxi 214035,China) |
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| Abstract: | IC mask in the production process,cleanning machine is an important relationship to the quality of the mask making.Because Mask process requires a large number of chemical solvents and the need to configure multiple heating control system,It makes this device to be a high failure rate,the vulnerability of more damage to the equipment.The article describes in detail the cleanning machine heating system control theory,including the Genius I/O,the handheld monitor,PID control,current monitor,the safety circuit and the heating pulse.On the control principle and circuit of the machine and troubleshooting an application example. |
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| Keywords: | Mask Genius I/O Hand-held monitor PID-controler Current- monitor Safety circuit Heating pulse |
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