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划片机空气静压电主轴材料选用及加工工艺研究
引用本文:贾月明,张伟.划片机空气静压电主轴材料选用及加工工艺研究[J].电子工业专用设备,2012,41(6):11-14.
作者姓名:贾月明  张伟
作者单位:北京中电科电子装备有限公司,北京,100176
摘    要:从划片机空气静压电主轴的结构出发,分析了主轴的技术要求,提出了主轴材料选用的基本原则,介绍了划片机主轴的常用材料,重点论述了划片机主轴的加工阶段划分、热处理安排和定位基准选择,给出了划片机主轴的加工工艺路线图,并在实践中进行了验证。

关 键 词:空气静压电主轴  材料选用  加工工艺  划片机

Study on Materials Selection and Processing Method for Aerostatic Motorized Spindle of Dicing Saw
JIA Yueming,ZHANG Wei.Study on Materials Selection and Processing Method for Aerostatic Motorized Spindle of Dicing Saw[J].Equipment for Electronic Products Marufacturing,2012,41(6):11-14.
Authors:JIA Yueming  ZHANG Wei
Affiliation:(CETC Beijing Electronic Equipment Co., Ltd, Beijing 100176, China)
Abstract:According to the structure of dicing saw's aerostatic motorized spindle, technology requirement of spindle is analyzed, basic principle of materials selection for spindle is suggested, and materials for dicing saw's spindle is introduced, then process stage division, heat treatment arrangement and benchmark choice for dicing saw's spindle are discussed stressly, finally processing method route for dicing saw's spindle is also given, which is tested in practice.
Keywords:Aerostatic motorized spindle  Materials selection  Processing method  Dicing saw
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