| 压电发电微电源国外研究进展 |
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| 引用本文： | 褚金奎,杜小振,朴相镐.压电发电微电源国外研究进展[J].压电与声光,2008,30(1):22-25. |
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| 作者姓名： | 褚金奎 杜小振 朴相镐 |
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| 作者单位： | 大连理工大学,精密与特种加工教育部重点实验室,辽宁省微纳米技术及系统重点实验室,辽宁,大连,116024 |
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| 基金项目： | 国家自然科学基金资助项目(50475153)，教育部新世纪优秀人才基金资助项目 |
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| 摘 要： | 微加工技术极大地促进了各类传感器系统的微型化、集成化,使微机电系统(MEMS)功能越来越强,功耗、体积越来越小,而微能源部分却日益成为MEMS微型化设计的瓶颈。该文系统介绍了一种在MEMS应用中有极具发展潜力的能源供应方式——压电微能源。压电微能源可通过收集环境能量来发电,具有长寿命、高能量密度、与MEMS工艺兼容等优点,在微系统中具有广泛的应用前景。
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| 关 键 词： | 微电源 压电悬臂梁 压电发电 微机电系统(MEMS) |
| 文章编号： | 1004-2474（2008）01-0022-04 |
| 收稿时间： | 2006-10-24 |
| 修稿时间： | 2006年10月24 |
Foreign Development of Piezoelectric Generators for MEMS |
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| CHU Jin-kui,DU Xiao-zhen,PIAO Xiang-gao.Foreign Development of Piezoelectric Generators for MEMS[J].Piezoelectrics & Acoustooptics,2008,30(1):22-25. |
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| Authors: | CHU Jin-kui DU Xiao-zhen PIAO Xiang-gao |
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| Abstract: | The development of micro fabrication impulses the sensor micromation and integration,and the sensor function becomes more comprehensive.On contrary,the power dissipation and volume decrease to very low and small.Researches on micro batteries develop slowly compared with other parts in the sensors.As a result the power supply has been a bottleneck in the design of MEMS.This paper introduces the development of piezoelectric generators harvesting ambient energy,radioisotope energy and human body energy.Such power source supplies have long lifetime and high energy density,which can integrate with MEMS.The successful research on the generators will bring fast increasing in system of micro wireless sensors and other self-power MEMS. |
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| Keywords: | micropower piezoelectric cantilever piezoelectric generator MEMS |
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