Strained single-crystal GOI (Ge on Insulator) arrays by rapid-melting growth from Si (1 1 1) micro-seeds |
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Authors: | T Sakane K Toko T Tanaka T Sadoh M Miyao |
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Affiliation: | a Department of Electronics, Kyushu University, 744 Motooka, Fukuoka 819-0395, Japan |
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Abstract: | Liquid-phase epitaxial growth of Ge islands on insulator (GOI) using Ni-imprint-induced Si (1 1 1) micro-crystal seeds (~1 μm?) is proposed. As a result, single-crystalline GOI (1 1 1) structures with large area (~10 μm?) are realized. The transmission electron microscopy observations reveal no dislocation or stacking fault in the laterally grown regions. Moreover, the Raman measurements show that the tensile strain (~0.2%) which enhances the carrier mobility is induced in the growth regions. This new method can be employed to realize the multi-functional SiGe large scale integrated circuits. |
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Keywords: | Germanium (Ge) Ge on Insulator (GOI) Metal induced crystallization (MIC) Liquid-phase epitaxial growth |
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