Reconstruction procedure for 3D micro X-ray absorption fine structure

A new approach for chemical speciation in stratified systems using 3D Micro-XAFS spectroscopy is developed by combining 3D Micro X-ray Fluorescence Spectroscopy (3D Micro-XRF) and conventional X-ray Absorption Fine Structure Spectroscopy (XAFS). A prominent field of application is stratified materials within which depth-resolved chemical speciation is required. Measurements are collected in fluorescence mode which in general lead to distorted spectra due to absorption effects. Developing a reliable reconstruction algorithm for obtaining undistorted spectra for superficial and in-depth layers is proposed and validated. The developed algorithm calculates the attenuation coefficients of the analyte for the successive layers facilitating a new spectroscopic tool for three-dimensionally resolved nondestructive chemical speciation.