Note: High speed optical profiler based on a phase-shifting technique using frequency-scanning lasers |
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Authors: | Kim Jong-Ahn Kang Chu-Shik Jin Jonghan Eom Cheon Jang Roma Kim Jae Wan |
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Affiliation: | Center for Length, Korea Research Institute of Standards and Science, Yuseong-gu, Daejeon, South Korea. |
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Abstract: | We present a high speed optical profiler (HSOP) using frequency-scanning lasers for three-dimensional profile measurements of microscopic structures. To improve upon previous techniques for implementing the HSOP, we developed frequency-scanning lasers and a compact microscopic interferometer. The controller of the HSOP was also modified to generate proper phase-shifting steps. For measurements of step height specimens, the HSOP showed results comparable with a commercial optical profiler, even with much higher measurement speeds (up to 30 Hz). The typical repeatability of step height measurement was less than 1 nm. We also present measurements of microscopic structures to verify the HSOP's ability to perform high speed inline inspection for the semiconductor and flat-panel display industries. |
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