Strong reduction of propagation losses in LiNbO3 ridge waveguides |
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| Affiliation: | 1. Department of Physical Electronics, Faculty of Nuclear Sciences and Physical Engineering, Czech Technical University, Břehová 7, 115 19 Prague 1, Czech Republic;2. Institute of Photonics and Electronics AS CR, v.v.i., Chaberská 57, 182 51 Prague 8, Czech Republic;1. Departamento de Física, Ingeniería de Sistemas y Teoría de la Señal, Universidad de Alicante, Apartado 99, E-03080 Alicante, Spain;2. Instituto Universitario de Física Aplicada a las Ciencias y las Tecnologías, Universidad de Alicante, Apartado 99, E-03080 Alicante, Spain;3. Departamento de Óptica, Farmacología y Anatomía, Universidad de Alicante, Apartado 99, E-03080 Alicante, Spain;1. School of Information Science and Engineering, Shandong University, Jinan, Shandong 250100, China;2. Key Laboratory for Laser Plasmas (Ministry of Education) and Department of Physics, Shanghai Jiao Tong University, Shanghai 200240, China;3. Key Laboratory of Materials for High Power Laser, Shanghai Institute of Optics and Fine Mechanics, Shanghai 201800, China;4. State Key Laboratory of Transient Optics and Photonics, Xi׳an Institute of Optics and Precision Mechanics, Chinese Academy of Sciences, Xi׳an 710119, China;1. Experimental Physics Department, Ural Federal University, 19 Mira Street, Yekaterinburg 620002, Russia;2. Institute of Physics, University of Tartu, 14c Ravila Street, Tartu 50411, Estonia |
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| Abstract: | We propose optimized processes for the reproducible production of LiNbO3 ridge waveguides with propagation losses lower than 0.2 dB/cm. The performances are achieved for both Z-propagating and Y-propagating waveguides, TE and TM polarizations, in X-cut LiNbO3 congruent substrates, and could be easily extrapolated to Z-cut substrates. The fabrication procedure is composed of three steps: titanium deposition, optical grade dicing and diffusion at high temperatures, so that lithography or cleanroom facilities are not required. The reproducible smooth waveguides with low propagation losses result from the diffusion step, which is performed after the production of the ridges. We also show how the losses can be evaluated from the Fabry–Perot effect in the waveguides, without any assumption on the input and output reflection coefficients. |
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| Keywords: | Lithium niobate Integrated optics Precise dicing Diffusion |
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