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A near edge X-ray absorption fine structure study of oxidized single crystal and polycrystalline diamond surfaces
Affiliation:1. Soreq NRC, Yavne 81800, Israel;2. Department of Chemistry and Biochemistry, Montana State University, Bozeman, MT 59717, United States;3. School of Physics, University of Melbourne, Victoria 3010, Australia;4. Australian Synchrotron, 800 Blackburn Road, Clayton, Victoria 3168 Australia;5. Schulich Department of Chemistry, Technion, Haifa 32000, Israel;1. Institute of Solid State Physics, TU Wien, Wiedner Hauptstraße 8-10/E138, Wien 1040, Austria;2. University Service Centre for Transmission Electron Microscopy, TU Wien, Wiedner Hauptstraße 8-10/E057-02, Wien 1040, Austria;1. Department of Applied Science for Electronics and Materials, Kyushu University, Kasuga, Fukuoka 816-8580, Japan;2. Department of Electrical Engineering, Faculty of Engineering, Aswan University, Aswan 81542, Egypt;3. Department of Physics, Faculty of Science, Aswan University, Aswan 81528, Egypt;4. Frontier Research Academy for Young Researchers, Kyushu Institute of Technology, Kitakyushu, Fukuoka 804-8550, Japan;5. Diamond Materials Team, Advanced Power Electronics Research Center, National Institute of Advanced Industrial Science and Technology (AIST), Osaka 563-8577, Japan;6. Graduate School of Information Science and Electrical Engineering, Kyushu University, Fukuoka 819-0395, Japan;1. School of Chemistry, University of Bristol, Bristol BS8 1TS, United Kingdom;2. Interface Analysis Centre, H.H. Wills Physics Laboratory, University of Bristol, Tyndall Avenue, Bristol BS8 1TL, United Kingdom;1. School of Materials Science and Engineering, Henan Polytechnic University, Jiaozuo, Henan 454000, China;2. State Key Laboratory of Superhard Materials, Jilin University, Changchun, Jilin 130012, China;3. School of Data Science, Tongren University, Tongren, Guizhou 554300, China
Abstract:The influence of oxidizing environments on single crystal diamond and polycrystalline chemical vapor deposited CVD diamond films was studied using the near edge X-ray absorption fine structure (NEXAFS) pre-edge region in both bulk and surface sensitive modes. The NEXAFS of (100) oriented single crystal diamond was measured following (i) exposure to a microwave (MW) hydrogen plasma, (ii) annealing to 1000 °C, (iii) exposure of the as annealed surface to H2O, and (iv) exposure of the as annealed surface to O2. From these measurements particular surface bonding configurations have been assigned to features in the pre-edge structure. The NEXAFS of microcrystalline CVD diamond films was studied following different oxidative treatments using (i) a thermal atomic oxygen (AO) environment, (ii) a hyperthermal (5 eV) AO source, and (iii) an RF oxygen plasma exposure. The nature of the surface layer was found to be different for differently oxidized surfaces. These treatments were carried out as part of a study of CVD diamond durability in the low Earth orbit space environment.
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