High-Q optomechanical circuits made from polished nanocrystalline diamond thin films |
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| Affiliation: | 1. Institute of Nanotechnology, Karlsruhe Institute of Technology, 76344 Eggenstein-Leopoldshafen, Germany;2. Fraunhofer Institute for Applied Solid State Physics, Tullastr. 72, 79108 Freiburg, Germany;1. Technological Institute for Superhard and Novel Carbon Materials, Troitsk, Moscow 142190, Russia;2. Moscow Institute of Physics and Technology, Moscow Region 141700, Russia;3. Zaporizhzhya National University, Physical Faculty, Zaporizhzhya 69600, Ukraine;1. Niccolò Cusano University, Via don Carlo Gnocchi, 3, 00166 Rome, Italy;2. Mediterranean Institute of Fundamental Physics ‘MIFP’, Via Appia Nuova, 31, 00040 Marino (Rome), Italy;3. Department of Sciences, University Roma Tre, Via della Vasca Navale, 84. 00154 Rome, Italy;4. A.M. Prokhorov General Physics Institute, Russian Academy of Sciences, 38 Vavilova Str, 119991 Moscow, Russia |
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| Abstract: | We demonstrate integrated optomechanical circuits with high mechanical quality factors prepared from nanocrystalline diamond thin films. Using chemomechanical polishing, the RMS surface roughness of as grown polycrystalline diamond films is reduced below 3 nm to allow for the fabrication of high-quality nanophotonic circuits. By integrating free-standing nanomechanical resonators into integrated optical devices, efficient read-out of the thermomechanical motion of diamond resonators is achieved with on-chip Mach–Zehnder interferometers. Mechanical quality factors up to 28,800 are measured for four-fold clamped optomechanical resonators coupled to the evanescent near-field of nanophotonic waveguides. Our platform holds promise for large-scale integration of optomechanical circuits for on-chip metrology and sensing applications. |
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