In the flow with MEMS |
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| Authors: | Rasmussen A Zaghloul ME |
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| Affiliation: | Dept. of Electr. Eng. & Comput. Sci., George Washington Univ., Washington, DC; |
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| Abstract: | Presents an overview of MEMS technology where we look at the different micromachining techniques and the CMOS fabrication process. Next we provide general information about flow sensors, including common applications. We will then analyze the structures used for MEMS flow sensors along with their associated CMOS circuits which can integrate the flow sensor into a smart flow-sensor system |
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