片上集成三电极体系微电极阵列的表征 |
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引用本文: | 吕尊实,周嘉,陈华,黄宜平,鲍敏杭. 片上集成三电极体系微电极阵列的表征[J]. 微纳电子技术, 2007, 0(Z1) |
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作者姓名: | 吕尊实 周嘉 陈华 黄宜平 鲍敏杭 |
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作者单位: | 复旦大学专用集成电路及系统国家重点实验室微电子学系 上海200433 |
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摘 要: | 设计制作了片上集成三电极体系微电极阵列。工作电极分为圆形和方形两种,电极特征尺寸为100~900μm,工作电极与对电极间距为50~200μm。利用循环伏安法,在氧化还原电位探针二茂铁甲醇的作用下,对各三电极微系统进行了电极性能表征,具体分析了工作电极的形状、大小、与对电极的间距对输出特性的影响,为片上集成三电极体系的微电极阵列的设计优化提供了实际依据。
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关 键 词: | 微电极 表征 循环伏安法 |
Characterization of on-Chip Three-Microelectrode-System Array |
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Abstract: | On-chip three-microelectrode-system arrays with square and disc working electrodes were designed and fabricated.The electrode dimensions ranged from 100~ 900 μm while the distances between the working electrodes and the counting electrodes were from 50~200 μm.The arrays were characterized by cyclic voltammetry in the presence of the redox probe ferrocenemethanol.The study results provide practical data for the optimization of such on-chip three-electrode-system arrays' design in the future. |
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Keywords: | microelectrode characterization cyclic voltammetry |
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