Electromigration in aluminum/silicon/copper metallization due to the presence of a thin oxide layer |
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Authors: | KA Koh SJ Chua |
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Affiliation: | (1) Brooktree Pte, No 1. Kallang Sector, #07-04, Kolam Ayer Industrial Park, 1334, Singapore;(2) Centre for Optoelectronics, Department of Electrical Engineering, National University of Singapore, 0511 Kent Ridge, Singapore |
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Abstract: | The effect of a thin layer of SiO2 (50 nm) on the electromigration behavior of Al/ 0.8wt.%Si/0.5wt.%Cu metallization, passivated by spin-on-glass, phosphorus
silicate glass and silicon nitride as part of the complementary metal oxide semiconductor technology fabrication process was
studied. It is found that voids were formed along the edge of the metallization line as opposed to formation at triple point
of grain boundaries. At the same stress current of 1 × 106 A/cm2, thicker metallization layer (600 nm) showed an improvement in median time to failure (MTF) (1.4 times) with smaller void
size (0.2 to 0.4 μm) over one without an underlying oxide, whereas if the metallization thickness is thin (300 nm), the MTF
is degraded (0.6 times) with larger void size formed (0.3 to 1.0 μm). |
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Keywords: | Al/Si/Cu electromigration metallization |
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