化学机械干式研磨的转化率建模及优化试验

化学机械干式研磨的最大去除率产生于化学固相反应与机械作用达到平衡时。建立了固相反应转化率的数学模型，以全面分析其影响因素。从影响因素中选择4个主要参数，展开固结SiO2磨料磨具研磨蓝宝石的试验研究。试验结果表明，按影响显著程度由高到低排列的4个参数分别为磨具转速、载荷、磨料粒径、磨料与结合剂的质量百分比，所研究范围内的化学机械作用最优参数组合是：粒径45 μm，百分比30%，载荷0.6 MPa，转速150 r/min。

Modeling and Optimization Experimental Research of Conversion Rates in Chemical Mechanical Dry Lapping

The maximum removal rate of chemical mechanical dry lapping was produced when the balance between the chemical solid-state reaction and mechanical action was achieved. The mathematic model of solid-state conversion rate was established to comprehensively analyze the influencing factors. 4 main parameters were selected from the influencing factors to carry out the experimental research on the lapping of sapphire with fixed SiO2 abrasive tools. The experimental results show that the 4 parameters ranked from high to low according to the significant degree of influence are the abrasive tool rotation speed, load, abrasive particle size, and the percentage of abrasive to the binder. The optimum parameter combination of chemical and mechanical action within the scope of research is that abrasive particle size is as 45 μm, percentage of abrasive to the binder is as 30%, load is as 0.6 MPa, and abrasive tool rotation speed is as 150 r/min.