Ionization dynamics in the laser plasma in a low pressure gas target |
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Authors: | R. A. Demidov S. G. Kalmykov A. M. Mozharov M. V. Petrenko M. E. Sasin |
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Affiliation: | 1. St. Petersburg State Polytechnical University, St. Petersburg, 199034, Russia 2. A. F. Ioffe Physical Technical Institute, St. Petersburg, 194021, Russia
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Abstract: | In Xe-laser-plasma short-wave-radiation sources, the laser-energy-to-EUV conversion efficiency (CE) turns out to be substantially lower than theoretical expectations. An estimation made in the present work is evidence of what a long period of the primary ionization, lasting up to a moment when high-Z ions appear to emit short-wave photons, can be considered as a main cause for the low CE values. During that period the plasma remains low-ionized and absorbs weakly the laser energy. Data deduced from laser light absorption measurements confirm the estimation above. A preionization of the gas target with the UV excimer laser pulse is proposed as a method to accelerate the ionization process. |
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