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Focus on Novel Nanoelectromechanical 3D Structures: Fabrication and Properties |
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| Authors: | Shooji Yamada Hiroshi Yamaguchi Sunao Ishihara |
| Affiliation: | Japan Advanced Institute of Science and Technology, 1-1 Asahidai, Nomi, Ishikawa 923-1292, Japan;NTT Basic Research Laboratories, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan;The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan |
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