Fabrication of single-mode polymeric optical waveguides bylaser-beam writing |
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Authors: | Yoshimura R Nakagome H Tomaru S Imamura S |
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Affiliation: | Opto-Electron. Labs., NTT Corp., Ibaraki; |
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Abstract: | A laser-beam writing system is developed for large-area optical waveguide fabrication. Single-mode embedded channel optical waveguides are successfully fabricated on both 4- and 8-in silicon substrates using deuterated fluoromethacrylate polymers by laser-beam writing in photoresist and dry etching. The propagation loss of the waveguides is as low as 0.1 dB/cm at 1.3 μm |
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