| Mirau干涉型微纳台阶高度测量系统的研究 |
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| 引用本文： | 郭鑫,施玉书,皮磊,张树,李适,李东升,高思田.Mirau干涉型微纳台阶高度测量系统的研究[J].计量学报,2017,38(2). |
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| 作者姓名： | 郭鑫 施玉书 皮磊 张树 李适 李东升 高思田 |
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| 作者单位： | 1. 中国计量大学 计量测试工程学院,浙江 杭州,310018;2. 中国计量科学研究院, 北京 100029;天津大学 精密测试技术及仪器国家重点实验室, 天津 300072;3. 中国计量科学研究院,北京,100029 |
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| 基金项目： | 国家重点研发计划，中国计量科学研究院基本科研业务费 |
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| 摘 要： | 为了实现纳米量级到微米量级的微观三维台阶样板高度的快速测量,在普通光学显微镜的基础上改造完成了一台微纳台阶高度测量装置,设计了整体硬件结构,编写了测量控制软件和数据处理软件,并结合Hilbert变换和小波变换实现三维表面形貌测量。使用不同高度的台阶样品进行测试,测试结果表明:系统测量准确度较高,测量重复性较好,垂直测量范围大于50 μm。
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| 关 键 词： | 计量学 Mirau干涉 微纳台阶高度测量 三维表面形貌测量 白光显微干涉 光学显微镜 |
Research on Micro/nano Step Height Measurement System of Mirau Interference |
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| GUO Xin,SHI Yu-shu,PI Lei,ZHANG Shu,LI Shi,LI Dong-sheng,GAO Si-tian.Research on Micro/nano Step Height Measurement System of Mirau Interference[J].Acta Metrologica Sinica,2017,38(2). |
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| Authors: | GUO Xin SHI Yu-shu PI Lei ZHANG Shu LI Shi LI Dong-sheng GAO Si-tian |
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| Abstract: | In order to realize the rapid measurement of the nanometer scale to the micro 3D step sample height, on the basis of ordinary optical microscope, a micro/nano step height measuring device is reconstructed.The whole hardware structure is designed.The measurement and control software and data processing software are programmed.Combined with Hilbert transform and wavelet transform, a new method of algorithm which is used for the reconstruction of 3D surface topography is proposed.The step samples of different height is used to test.The measurement results indicate that this system has high measurement accuracy and high repeatability, and its measurement range in vertical direction is not less than 50 μm. |
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| Keywords: | metrology Mirau interference micro/nano step height measurement 3D surface topography measurement white light microscope interference optical microscope |
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