Reduced-order modeling of weakly nonlinear MEMS devices with Taylor-series expansion and Arnoldi approach |
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Authors: | Jinghong Chen Sung-Mo Kang Jun Zou Chang Liu Schutt-Aine JE |
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Affiliation: | Agere Syst., Holmdel, NJ, USA; |
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Abstract: | In this paper, we present a new technique by combining the Taylor series expansion with the Arnoldi method to automatically develop reduced-order models for coupled energy domain nonlinear microelectromechanical devices. An electrostatically actuated fixed-fixed beam structure with squeeze-film damping effect is examined to illustrate the model-order reduction method. Simulation results show that the reduced-order nonlinear models can accurately capture the device dynamic behavior over a much larger range of device deformation than the conventional linearized model. Compared with the fully meshed finite-difference method, the model reduction method provides accurate models using orders of magnitude less computation. The reduced MEMS device models are represented by a small number of differential and algebraic equations and thus can be conveniently inserted into a circuit simulator for fast and efficient system-level simulation. |
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